Txhua yam khoom tuaj yeem sputtered ntawm lub tshuab nqus tsev txheej

Txhua yam khoom tuaj yeem sputtered ntawm lub tshuab nqus tsev txheej

Tam sim no qhov ceev ntawm ib txwm glow paug muaj feem xyuam rau cov khoom siv cathode thiab cov duab, roj siab thiab lwm yam. Nws yuav tsum tau khaws cia kom ruaj khov li sai tau thaum sputtering. Txhua yam khoom tuaj yeem raug sputtered, txawm tias cov ntaub ntawv melting siab tuaj yeem yooj yim sputtered, tab sis xov tooj cua zaus (RF) lossis mem tes (mem tes) sputtering yuav tsum tau rau cov hom phiaj uas tsis yog tus neeg xyuas pib; thiab vim tsis zoo conductivity, sputtering zog thiab ceev yog kuj siab. Tsawg. Hlau sputtering zog mus txog 10W / cm2, tsis yog hlau<5W/cm2

Nqus coater etching thiab txheej

Qhov saum npoo ntawm cov khoom yog bombarded nrog them hais nrog kaum ntawm electron volts los yog siab dua kinetic zog, kom nws sputters tawm mus rau hauv lub roj theem, uas yuav siv tau rau etching thiab txheej. Tus naj npawb ntawm atoms sputtered los ntawm qhov xwm txheej ion hu ua sputtering yield. Qhov siab dua qhov tawm los, qhov ceev ntawm sputtering ceev. Cu, Au, Ag yog siab tshaj, thiab Ti, Mo, Ta, W yog qis tshaj. Feem ntau 0 1-10 atoms/ion. Cov ions tuaj yeem tsim DC glow tawm. Thaum lub tshuab nqus tsev kawm ntawv qib siab ntawm 10-1-10 Pa, qhov hluav taws xob siab yog siv nruab nrab ntawm ob tus ncej los ua kom muaj paug tawm. Cov ions zoo yuav ua rau lub hom phiaj tsis zoo thiab ua rau lub hom phiaj, thiab plated kom txog thaum nws tau plated. ntawm yam.

Kev tu lub tshuab nqus tsev txheej tshuab

1. Nws yog ib qho tsim nyog los ntsuas qhov kev faib ua feem ntawm cov roj sealing kev ua tau zoo hauv lub tshuab nqus tsev kom paub tseeb tias cov cua nruj tuaj yeem ua tau raws li qhov yuav tsum tau ua.

2. Tom qab ntawd xyuas qhov luaj li cas, cov duab thiab cov pa tawm ceev ntawm lub tshuab nqus tsev vacuum, txheeb xyuas cov kev daws teeb meem thiab siv nws.

3. Nws yog ib qho tsim nyog yuav tsum paub meej tias qhov xau ntawm lub tshuab nqus tsev plating yog qhov tseeb lossis tsis tseeb, vim tias tom qab cov khoom siv ua haujlwm tau rhuab, qee cov roj yuav raug tsim tawm mus rau qhov sib txawv, thiab qee zaum nws yog qhov yuam kev rau cov roj ntws los ntawm lub tshuab. sab nraum. Qhov no yog cuav leakage. Peb los txiav txim qhov no tawm.

4. Txiav txim siab qhov tsawg kawg nkaus qhov kev kuaj pom tus nqi thiab kev xau kom paub tseeb ntawm cov cuab yeej kuaj xyuas, kuaj xyuas cov pa xau hauv qhov loj tshaj plaws, zam qee qhov xau tsis raug ignored, thiab txhim kho qhov tseeb ntawm kev kuaj pom.

5. Thaum kawg, nws yog ib qho tsim nyog kom tsis txhob muaj qhov thaiv ntawm lub tshuab nqus tsev plating. Qee lub sij hawm vim kev ua haujlwm tsis raug, lub tshuab nqus tsev electroplating yog nyob rau hauv tus txheej txheem ntawm khaws cov xau, thiab qee cov plua plav lossis kua yuav thaiv cov xau, xav tias tsis muaj cov xau ntawm qhov chaw ntawd, tab sis thaum cov blockage no yuav tsis thaiv cov xau vim qhov nce siab qhov sib txawv ntawm sab hauv thiab sab nraud, tab sis cov pa tawm yuav tseem nyob.

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