Deposition ntawm nyias films ntawm substrates los ntawm sputtering txoj kev ntawm lub tshuab nqus tsev coater

Deposition ntawm nyias films ntawm substrates los ntawm sputtering txoj kev ntawm lub tshuab nqus tsev coater

Sputtering yog ib qho tshwm sim nyob rau hauv uas them cov khoom (feem ntau zoo ions ntawm inert gas) yog siv los bombard lub nto ntawm ib tug khoom (tom qab no hu ua lub hom phiaj), yog li ua rau atoms (los yog molecules) nyob rau saum npoo ntawm lub hom phiaj kom dim ntawm. nws. Qhov tshwm sim no tau pom los ntawm Grove hauv 1842 thaum sim kawm txog qhov teeb meem ntawm cathodic corrosion, thaum cov khoom siv cathode tau tsiv mus rau phab ntsa ntawm lub tshuab nqus tsev. Lub tshuab nqus tsev coater siv cov txheej txheem sputtering los tso cov yeeb yaj kiab nyias ntawm lub substrate tau qhia hauv xyoo 1877.

Classification thiab Scope ntawm daim ntawv thov ntawm lub tshuab nqus tsev txheej tshuab

Feem ntau cov workpiece degassing txoj kev peb siv yog ci, thiab cov pa roj thiab noo nyob rau hauv lub workpiece yog tawm los ntawm cua sov. Ua ntej txheej, lub workpiece yog rhuab thaum siv. Ua ke nrog cov roj hauv lub tshuab nqus tsev, nws raug tso tawm los ntawm lub tshuab nqus tsev twj.

Kev ntsuas degassing sib txawv raug coj mus rau cov khoom sib txawv kom tswj tau cov pa tawm ntawm cov pa thiab ya raws hauv qhov chaw ua haujlwm, thiab txhim kho kev ruaj ntseg thiab sib xws ntawm txheej. Kev faib tawm thiab thaj tsam ntawm daim ntawv thov lub tshuab nqus tsev txheej tshuab Nqus txheej tshuab feem ntau yog hais txog ib hom txheej uas yuav tsum tau ua nyob rau hauv lub tshuab nqus tsev siab, suav nrog ntau hom, suav nrog lub tshuab nqus tsev vacuum, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition. Thiab ntau yam.

Qhov tshwm sim ntawm lub tshuab nqus tsev txheej yog nyob ntawm lub cev lub cev ntawm lub workpiece nws tus kheej

Qee qhov workpieces muaj roj ntau, noo noo, thiab lwm yam hauv lawv tus kheej. Cov tshuaj no yuav raug tso tawm mus rau hauv lub tshuab nqus tsev thaum cov khoom siv tau rhuab, txo qhov nqus tsev kawm ntawv. Dab tsi ntxiv, qee cov pa roj muaj cov tshuaj lom neeg, uas ua rau lub tshuab nqus tsev puas ncaj qha. Internal mechanical qauv ua rau cov cuab yeej ua haujlwm tsis zoo. Tsis tas li ntawd, thaum lub sij hawm txheej txheej txheej, vim yog cua sov thiab nthuav dav ntawm cov pa hauv workpiece, nws yog ib qho yooj yim rau tawg cov coated zaj duab xis. Ntawm chav kawm, qhov tshwm sim ntawm qhov xwm txheej no nyob ntawm lub cev lub cev ntawm lub workpiece nws tus kheej, xws li cov yas uas yooj yim nthuav, qhov tshwm sim yog qhov siab. Rau cov ntaub ntawv nyuaj xws li hlau, qhov tshwm sim yog qhov tsawg, tab sis nws tsis tuaj yeem tsis quav ntsej, yog li degassing ntawm lub workpiece yog qhov tsim nyog heev.

Lub xeev lub tshuab nqus tsev yog ib puag ncig uas txhawb nqa kev ua haujlwm ntawm lub tshuab nqus tsev, tshwj xeeb tshaj yog cov khoom siv uas yuav tsum muaj lub tshuab nqus tsev siab. Feem ntau peb yuav tsum ua kom tiav qib siab ntawm lub tshuab nqus tsev. Lub luag hauj lwm ntawm cov cua extraction system yog indispensable, tab sis nyob rau hauv tas li ntawd mus rau cov huab cua extraction system, nyob rau hauv lub tshuab nqus tsev txheej cov khoom nyob rau hauv cov txheej txheem ntawm kev ua hauj lwm, lwm lub ntsiab lus yog degassing ntawm lub workpiece.

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