Tsim lub vojvoog ntawm electroplating abrasive cuab tam substrate

Tsim lub vojvoog ntawm electroplating abrasive cuab tam substrate

Raws li qhov ceev ntawm cov cuab yeej sib tsoo nce, qhov roughness tus nqi ntawm qhov sib tsoo nto txo ​​qis, uas yog vim qhov kev nce ntawm qhov sib tsoo lub log yuav tsis deform ib qho abrasive particle thiab txo cov thickness ntawm cov khoom sib tsoo. Kev kub ceev sib tsoo tuaj yeem txhim kho cov hlau tshem tawm thiab txo kev sib tsoo

Txo kev siv hluav taws xob tuaj yeem txhim kho kev sib tsoo. Ua kom nrawm ntawm CBN cov cuab yeej sib tsoo tuaj yeem txhim kho qhov roughness ntawm lub workpiece; Qhov siab dua qhov ceev ntawm cov cuab yeej sib tsoo, qhov zoo dua qhov roughness ntawm lub workpiece. Lub tangential thiab ib txwm sib tsoo quab yuam txo qis, uas txo cov quab yuam los ntawm ib qho abrasive particle. Yog li ntawd, qhov hnav ntawm cov cuab yeej sib tsoo yog txo thiab kev sib tsoo kub tuaj yeem txo. Txawm li cas los xij, qhov nce hauv kev sib tsoo cov cuab yeej ceev ua rau txo qis qhov siab tshaj plaws txiav qhov tob ntawm cov khoom abrasive, qhov txo qis hauv qhov sib tsoo ntawm cov chips, thiab qhov nce hauv lub sij hawm txiav thiab sib tsoo kub, ob qho tib si ua rau kom muaj qhov txhaws. [1]. Raws li cov txheej txheem yuav tsum tau, thaum lub linear ceev ntawm cov cuab yeej sib tsoo yog siab tshaj 30mps, lub tshuab cuab tam ceev yuav tsum tau mus txog 6000rpm; Txhawm rau tiv thaiv qhov tsis zoo tshwm sim los ntawm lub tshuab cuab yeej vibration, peb feem ntau xaiv 4000rpm. Nyob rau ntawm no, lub linear tshaj tawm ntawm ntug ntawm cov cuab yeej sib tsoo yog v=π dn. D yog txoj kab uas hla ntawm cov cuab yeej sib tsoo, thiab n yog lub tshuab ceev. Peb xaiv d=200mm thiab xam v=41.9mps, uas ua tau raws li qhov xav tau ceev ntawm cov txheej txheem ua haujlwm.

2. Thickness xaiv ntawm cov cuab yeej sib tsoo substrate

Tag nrho cov thickness ntawm cov cuab yeej sib tsoo yog 2 hli, xav txog lub thickness ntawm cov txheej thiab hauv qab npib tsib xee, tsim substrate thickness δ= 2-2d1-2d2. D1 yog qhov loj me me ntawm electroplating abrasive, thiab d2 yog qhov tuab ntawm cov npib tsib xee hauv qab. Feem ntau, lub thickness ntawm cov npib tsib xee hauv qab yog 3-5 μ m. Sib 4m. Kev xaiv ntawm abrasive particle loj feem ntau txiav txim siab qhov yuav tsum tau ntawm kev sib tsoo efficiency thiab workpiece nto roughness. Nrog rau ob qho xwm txheej, peb xaiv CBN nrog qhov ntau thiab tsawg ntawm 100 txog 120, raws li GB{10}} tus qauv, nrog rau qhov ntau thiab tsawg ntawm 120 txog 150 μ m. tuaj yeem nqa tus nqi siab tshaj plaws ntawm 150 μ m. xam thickness δ= 1.692mm. Txawm li cas los xij, xav txog qhov thermal expansion ntawm cov xuab zeb hais, raws li kev paub, lub thermal expansion yog kwv yees li 5 μ m. Yog li ntawd, qhov kawg thickness yog txiav txim raws li δ= 1.687mm.

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