Electrons yog emissions los ntawm grain ciam teb ntawm lub tshuab nqus tsev coaters

Electrons yog emissions los ntawm grain ciam teb ntawm lub tshuab nqus tsev coaters

Cov hlau ions raug nyiam rau saum npoo ntawm cathode thiab tuaj yeem tsim kom muaj qhov chaw them nqi. Lub zog hluav taws xob ua rau lub sijhawm no ua rau cov khoom siv hluav taws xob tawm ntawm microcracks los yog grain ciam nrog me me ua haujlwm ntawm lub cathode nto.

Nqus sab hauv phab ntsa thiab lub hom phiaj qhov chaw anode ntawm lub tshuab nqus tsev txheej

Tom qab ntau qhov kev sib tsoo, lub zog ntawm cov hluav taws xob maj mam txo qis, tshem tawm cov shackles ntawm cov kab hlau nplaum, thiab thaum kawg ntog rau ntawm lub substrate, sab hauv phab ntsa ntawm lub tshuab nqus tsev chamber thiab lub anode ntawm lub hom phiaj. Nyob rau hauv lub acceleration ntawm high-voltage hluav taws xob teb, Ar plus ions sib tsoo nrog lub hom phiaj thiab tso tawm lub zog, ua rau cov atoms nyob rau saum npoo ntawm lub hom phiaj absorbs lub kinetic zog ntawm Ar ntxiv ions thiab tawg tawm ntawm lub qub lattice, thiab lub hom phiaj nruab nrab atoms khiav tawm ntawm qhov chaw ntawm lub hom phiaj. Yoov mus rau lub substrate thiab tso ib zaj duab xis nyias ntawm lub substrate.

Nqus Coater Magnetron Sputtering System

Nyob rau hauv magnetron sputtering system, ib tug 100-1000 Gauss haib hlau nplaum yog muab tso rau tom qab lub cathode lub hom phiaj, thiab lub tshuab nqus tsev vacuum chamber yog ntim nrog ib tug inert gas (Ar) nrog ib tug siab ntawm 011-10 Pa raws li ib tug carrier rau roj. tso tawm. Nyob rau hauv qhov kev txiav txim ntawm high voltage, Ar atoms ionized rau hauv Ar ntxiv ions thiab electrons. Nyob rau hauv tus txheej txheem ntawm accelerating thiab ya mus rau lub substrate, cov electrons raug cuam tshuam los ntawm ib tug magnetic teb perpendicular mus rau lub hluav taws xob teb, uas ua rau cov electrons deflected thiab khi nyob rau hauv lub plasma cheeb tsam ze rau lub hom phiaj nto. Nws nce mus raws lub hom phiaj nto nyob rau hauv ib tug cycloid yam, thiab collides nrog Ar atoms tsis tu ncua thaum lub sij hawm lub zog, ionizing ib tug loj tus naj npawb ntawm Ar ntxiv ions.

Tsis tshua muaj siab hardness thiab hnav tsis kam ntawm lub tshuab nqus tsev coater

1. Vim tias cov khoom siv txheej txheej ntawm qhov chaw muaj qhov nyuaj siab heev thiab hnav tsis kam, piv nrog cov cemented carbide uas tsis muaj coated, cov coated cemented carbide tso cai rau kev txiav nrawm dua, yog li txhim kho kev ua haujlwm; Txhim kho cov cuab yeej siv tau zoo ntawm tib qhov kev txiav ceev.

2. Vim tias qhov sib txhuam coefficient ntawm cov khoom siv txheej thiab cov khoom yuav tsum tau ua yog me me, qhov txiav quab yuam ntawm cov hniav coated yog txo rau qee qhov piv nrog cov hniav uas tsis muaj coated.

3. Thaum coated hniav yog ua tiav, qhov zoo ntawm cov txheej txheem ua tau zoo dua.

4. Vim muaj kev ua tau zoo, cov hniav coated muaj ntau yam zoo dua. Ib qib coated ntawm cov hniav muaj ntau yam kev siv.

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