Yuav Ua Li Cas Cov Phaj Cua Sov Ua Tau Raws Li SEMI Standards rau Semiconductor Manufacturing Equipment?

Kev tsim khoom ntawm semiconductors xav tau kev huv huv thiab huv ntawm cov ntaub ntawv. Cov phaj cua sov siv hauv cov khoom siv wafer yuav tsum ua kom tau raws li cov txheej txheem SEMI nruj heev uas dhau mus dhau qhov kev nyab xeeb hluav taws xob muaj xws li outgassing, particle ntau lawm thiab cov khoom sib xws.

SEMI Standards yog dab tsi
SEMI (Semiconductor Equipment and Materials International) yog lub koom haum kev lag luam thoob ntiaj teb uas tsim cov qauv los xyuas kom meej qhov zoo, kev nyab xeeb thiab ib puag ncig kev sib raug zoo ntawm cov khoom siv semiconductor. Cov qauv no yog qhov tseem ceeb rau kev huv thiab kev ua haujlwm xav tau hauv kev tsim khoom semiconductor. SEMI cov qauv nthuav dav dav ntawm cov ncauj lus suav nrog cov khoom siv kev nyab xeeb (S2), ib puag ncig kev sib raug zoo (S8) thiab cov khoom siv - cov cai tshwj xeeb. Thaum nws los txog rau cov phaj cua sov SEMI kev ua raws li txhais tau tias lawv ua tau raws li cov qauv purity siab xav tau rau kev tsim khoom semiconductor.

SEMI Standards Key for Heater Phaj
SEMI S2 - Kev nyab xeeb ntawm cov khoom siv
SEMI S2 tsim kom muaj kev nyab xeeb dav dav rau cov khoom siv semiconductor kom ntseeg tau tias cov phaj cua sov muaj kev nyab xeeb rau kev siv nyob rau hauv ib puag ncig kev tsim khoom. . SEMI S2 kev ua raws cai tau raug lees paub los ntawm qhov thib peb - kev ntsuam xyuas tog ua los ntawm tus kws ntsuam xyuas SEMI S2 certified. Tus txheej txheem suav nrog kev nyab xeeb hluav taws xob, kev ua haujlwm zoo thiab kev ua haujlwm ntawm cov khoom siv.

SEMI S3 - Cov Lus Qhia Txog Kev Nyab Xeeb rau Cov Chav Dej Kub Dej
SEMI S3 muaj feem xyuam rau cov cuab yeej kev nyab xeeb hauv chav da dej rhuab. Cov qauv no tau lees paub tias cov phaj cua sov, ua haujlwm hauv cov txheej txheem tshuaj lom neeg, tsis ua rau muaj kev nyab xeeb lossis ua haujlwm tsis zoo. Nws kuj suav nrog cov ntaub ntawv thiab cov qauv kom tsis txhob muaj kev sib kis los ntawm cov tshuaj kub kub.

SEMI F57 - Specification rau Cov Khoom Siv Polymer hauv Ultrapure Dej thiab Cov Tshuaj Ua Kua Dej
SEMI F57 txhais cov qauv rau cov ntaub ntawv polymer, nrog rau cov txheej txheem ntawm cov cua sov phaj, nyob rau hauv kev sib cuag nrog ultra ntshiab dej thiab kua tshuaj. Cov txheej txheem no tau lees paub tias cov khoom siv hauv cov khoom siv semiconductor yog sib xws nrog ultra- cov kua dej ntshiab thiab tsis cuam tshuam cov txheej txheem purity.

Certification Standards rau cua sov phaj
Cov phaj cua sov hauv cov khoom siv semiconductor yuav tsum tau ua nruj me ntsis rau cov qauv SEMI. Cov kev ntsuam xyuas no muaj feem xyuam rau cov khoom zoo, cov kab mob tsis sib haum xeeb thiab tshuaj lom neeg sib raug zoo:

ASTM E 595 Cov Khoom Siv Hluav Taws Xob
Outgassing yog qhov emission ntawm cov tshuaj volatile los ntawm cov ntaub ntawv ntawm cov cua sov phaj rau cua sov. Hauv kev tsim khoom siv hluav taws xob, kev sib kis hauv qhov chaw huv huv tuaj yeem ua rau muaj kev ua txhaum ntawm cov khoom siv hluav taws xob semiconductor txawm tias me me ntawm cov pa tawm. Cov phaj cua sov ua los ntawm cov ntaub ntawv xws li PTFE thiab PFA txheej yuav tsum raug kuaj rau kev tawm dag zog raws li ASTM E595 cov kev cai kom lav tias lawv tsis tso cov khoom txaus ntshai thaum ua haujlwm.

Particle poob -tawm
Cov phaj cua sov yuav tsum tau tsim kom txo qis kev tsim cov khoom uas tuaj yeem ua rau cov wafer los yog tshuaj ua haujlwm. Txhua yam khoom uas tuaj yeem cuam tshuam nrog cov txheej txheem cov kua dej yuav tsum tau kuaj xyuas kom ntseeg tau tias nws tsis tso cov khoom mus rau theem uas yuav cuam tshuam rau cov txheej txheem tsim khoom hauv semiconductor fabs.

Resistance rau txheej txheem tshuaj
Cov phaj cua sov hauv cov khoom siv hluav taws xob feem ntau raug rau cov tshuaj phem xws li acids, cov kuab tshuaj thiab dej ultrapure. Cov ntaub ntawv no yuav tsum muaj corrosion resistant thiab resistant rau degradation nyob rau hauv cov xwm txheej tshwj xeeb ntawm cov txheej txheem semiconductor ntau lawm. PTFE thiab PFA txheej yog dav siv rau cov cua sov daim hlau vim lawv cov tshuaj tiv thaiv zoo tshaj plaws, kom ntseeg tau tias kev ncaj ncees ntawm cov cua sov saum npoo yog khaws cia yam tsis muaj kev qhia txog cov kab mob.

SEMI Standards for Heated Platens and Chucks Tseem ceeb SEMI Standards SEMI S2 - Equipment Safety (Kev Nyab Xeeb Kev Nyab Xeeb)

SEMI S3 - Cov Lus Qhia Txog Kev Nyab Xeeb rau Kev Nyab Xeeb Chav Dej Kub

SEMI F57 - Specification rau Cov Khoom Siv Polymer hauv Ultra Pure Dej thiab Cov Tshuaj Ua Kua Dej

ASTM E595 Kev Tshawb Fawb Kev Tshawb Fawb

SEMI F47 - Cov Kev Pom Zoo Pom Zoo rau Semiconductor Manufacturing Equipment

Xaus
SEMI yog tus txheej txheem uas cov cua sov phaj siv hauv cov khoom siv semiconductor yuav tsum ua tau raws li cov qauv kev huv thiab kev nyab xeeb ntawm kev lag luam semiconductor. Cov phaj cua sov tau lees paub tias tsis muaj hlau paug, txo cov khoom me me thiab ua tau raws li cov kev cai tawm los tiv thaiv cov txheej txheem tsim khoom semiconductor. Niche sectors tab tom tsim lawv tus kheej cov qauv tshwj xeeb kom ua tiav lawv cov kev xav tau tshwj xeeb. Ua raws li cov qauv no ua kom cov cuab yeej ua tau raws li qhov nruj, siab -kev ua tau zoo ntawm kev lag luam semiconductor.