Yuav Ua Li Cas Cov Phaj Cua Sov Tsim Kom Ua Tau Raws Li Cov Qauv Cleanroom Compatibility?
Tso lus
Txhua yam khoom siv hauv cov khoom siv hluav taws xob semiconductor, cov tshuaj ua kom tiav - cov chav ua kom tiav thiab cov chav ua haujlwm hauv aerospace yog qhov muaj peev xwm ntawm cov khoom seem thiab cov pa tawm. Cov phaj cua sov siv rau hauv cov xwm txheej zoo li no yuav tsum tau tsim thiab tsim kom ua tiav cov txheej txheem siab ntawm chav huv huv.
Qhov yuav tsum tau muaj rau chav huv
TS EN ISO 14644-1 tsim cov chav kawm ntawm huab cua huv rau chav huv los ntawm kev xa mus rau qhov siab tshaj plaws tso cai suav rau ib lub cubic meter. Particle txwv yog qhov tseem ceeb rau kev ncaj ncees ntawm cov txheej txheem tsim khoom. Piv txwv li, hauv ISO Class 1 cleanrooms, tsuas yog 1 qhov loj dua 0.5 microns tau tso cai hauv ib lub cubic meter, hos ISO Class 5 cleanrooms tso cai txog 3,520 cov khoom hauv tib lub ntim.
Yuav kom ua tau raws li cov lus qhia tshwj xeeb no, txhua yam khoom siv nrog rau cov phiaj xwm cua sov yuav tsum tau tsim kom nws tsis tsim cov khoom uas tshaj qhov txwv tau teev tseg. Qhov no txhais tau hais tias kev tsim cov cua kub daim hlau yuav tsum tau ua nrog cov ntaub ntawv tshwj xeeb, txheej thiab cov qauv tsim uas txo cov particle shedding, outgassing thiab paug.
Tsim Cov Cuab Yeej Cuab Yeej Hauv Cov Chav Dej
Xaiv cov khoom siv
Kev xaiv cov khoom siv yog ib qho tseem ceeb hauv kev txhim kho chav huv huv- cov phaj cua sov sib xws. Cov khoom xaiv yog stainless hlau (feem ntau electropolished 316L) vim nws tsis tshua muaj particle shedding thiab yog yooj yim los ntxuav. Stainless hlau yog ruaj thiab muaj tus du, tsis yog -reactive nto uas yuav tsis corrode los yog tso cov khoom txaus ntshai mus rau hauv ib puag ncig huv si.
PTFE txheej kuj tuaj yeem ua haujlwm rau qee lub hom phiaj. Txawm li cas los xij, lawv yuav tsum tau thov kom raug kom lawv tsis txhob flake lossis degrade nrog lub sijhawm. Lub chav huv huv ntawm PTFE yog nyob ntawm qhov muaj qhov tsis zoo ntawm qhov chaw uas yuav ua rau muaj qhov paug paug thiab ua kom raug.
Ua tiav Nto
Kev ua tiav ntawm qhov chaw du yog qhov yuav tsum tau ua rau cov cua sov phaj hauv chav huv. Cov cuab yeej huv huv feem ntau muaj Ra qhov tseem ceeb (roughness nruab nrab) ntawm 0.4 µm lossis zoo dua. Qhov no smoothness txo cov adherence ntawm hais thiab tiv thaiv lub buildup ntawm impurities ntawm qhov chaw. Cov chaw du kuj pab tu, uas txhais tau tias kev huv huv tuaj yeem tswj tau zoo hauv cov xwm txheej tswj.
Tiv thaiv kev tawm tsam
Outgassing ntawm adhesives, lubricants thiab cov ntaub ntawv rwb thaiv tsev hlau yuav tsum tau txo kom tsawg rau kev siv chav huv. Cov ntaub ntawv siv rau hauv cov cua sov phaj yog ua tib zoo xaiv kom tau raws li ASTM E595 cov cai rau kev tawm. Cov txheej txheem no tshuaj xyuas tag nrho cov khoom poob (TML) thiab khaws cov khoom tsis zoo (CVCM) ntawm cov khoom siv rau cov khoom siv huv. Cov phaj cua sov yuav tsum ua kom muaj kev nruj me ntsis- cov txheej txheem tawm ntawm qhov hluav taws xob kom tsis txhob kis tau rau ib puag ncig nrog cov khoom evaporating.
Sealant:
Txhawm rau tswj kom muaj kev ncaj ncees ntawm chav huv, cov ntaub thaiv hluav taws xob uas tau teeb tsa rau ntawm cov phiaj xwm cua sov yuav tsum tau muab kaw kom tsis txhob muaj cov khoom sab hauv tuaj yeem khiav mus rau ib puag ncig. Qhov no feem ntau ua nrog IP65 enclosures uas muab kev tiv thaiv plua plav thiab dej nkag. Lub sealing tiv thaiv cov khoom txaus ntshai los ntawm kev khiav tawm ntawm sab hauv ntawm lub phaj cua sov kom cov chav huv huv huv thiab tsis muaj paug.
Cleanroom Heating Phaj Design List Checklist
Tsim Feature Requirement Standard/Specification
Cov ntaub ntawv Stainless hlau (316L electropolished), PTFE (yog muaj) ASTM F1387 rau stainless hlau PTFE ua qauv
Nto Finish Smooth finish (Ra <0.4 µm) ISO 14644-1, Ra < 0.4 µm
Outgassing Tsawg outgassing (ua tau raws li ASTM E595 qhov yuav tsum tau) ASTM E595: Tag Nrho Cov Poob Tsawg <1%
Kev sib khi IEC 60529 rau kev sib khi IP65 lossis qib siab dua
Xaus
Cov phaj cua sov uas tau tsim ua raws li cov kev cai huv huv yuav tsum tau ua tib zoo xaiv cov khoom siv, kev ua tiav ntawm qhov chaw thiab kev sib koom ua ke kom huv si hauv kev tswj xyuas. Cov kev cai huv huv xav tau kev txwv nruj me ntsis thiab cov kab mob tsis huv, ua tiav los ntawm cov khoom siv qis- tawm, cov npoo du, thiab 316L electropolished stainless hlau nyob rau hauv cov cua kub daim hlau.
Kev tswj kev kis kab mob yog qhov yuav tsum tau ua hauv qib uas suav nrog txhua yam khoom siv hauv chav huv, tsis yog ib qho kev tsim khoom siv. Ua raws li cov txheej txheem nruj no ua kom cov phiaj xwm cua sov ua rau muaj kev ncaj ncees thiab kev ua haujlwm ntawm chav huv huv.
