Yuav ua li cas yog Silicone Heaters siv nyob rau hauv Semiconductor Wafer Processing?

Silicone warmers ua si ntau lub luag haujlwm tseem ceeb hauv semiconductor wafer ua.
Ib qho tseem ceeb ntawm kev siv yog nyob rau hauv cov txheej txheem annealing. Annealing yog ib qho tseem ceeb rau txo qhov tsis xws luag thiab txhim kho cov crystalline zoo ntawm wafer. Silicone warmers muab qhov tshwj xeeb thiab zoo sov sov kom paub tseeb tias qhov kev sib tsoo yuav siv sij hawm me ntsis thoob plaws hauv qhov chaw wafer, txhim kho nws cov hluav taws xob thiab cov khoom siv kho tshuab.
Lawv raug ntiav nyob rau hauv lub deposition ntawm skinny movies mus rau lub wafers. Kev tswj xyuas qhov kub thiab txias tag nrho los ntawm kev tso tawm ua kom yooj yim tswj cov zaj duab xis boom tus nqi, microstructure, thiab adhesion zog, uas yog ib qho tseem ceeb rau tag nrho cov kev ua tau zoo ntawm cov khoom siv semiconductor.
Silicone warmers yog siv nyob rau hauv lub curing ntawm photoresist txheej siv rau lub wafers. Kev tswj xyuas qhov sov sov tau lees paub tias cov photoresist zoo kho tau zoo, ua rau lub siab raug cov qauv thiab cov kauj ruam tom ntej.
Thaum lub sij hawm wafer cleansing txheej txheem, silicone warmers yuav siv tau los ua kom sov cov lus teb ntxuav los kho lawv cov kev ua kom huv si thiab pov tseg cov kab mob zoo dua.
Hauv qee qhov xwm txheej, lawv tau siv rau hauv qhov kev sim tawm thiab tus cwj pwm ntawm wafers. Kev tswj qhov kub thiab txias ua kom yooj yim kom tau txais cov txiaj ntsig zoo li niaj zaus thiab ntseeg tau.
Piv txwv li, nyob rau hauv ib tug semiconductor fabrication facility, silicone warmers yog tej zaum incorporated txoj cai mus rau hauv ib tug tshwj xeeb annealing chamber, raws nraim tswj qhov kub thiab txias ramp-up thiab tswj cov xwm txheej kom tau txais qhov nyiam annealing cuam tshuam ntawm wafers.