Yuav Ua Li Cas Thermocouples Ua Hauv Kev Saib Xyuas Semiconductor Wafer Ua Haujlwm?

Thermocouples muab qhov ntsuas kub kom raug. Nyob rau hauv semiconductor wafer ua, tshwj xeeb kub tswj yog ib qho tseem ceeb kom paub tseeb tias qhov zoo tshaj plaws thiab tag nrho kev ua tau zoo ntawm wafers. Thermocouples tuaj yeem ntsuas qhov kub thiab txias nrog ntau daim ntawv pov thawj ntawm qhov tseeb, suav nrog kev ntsuas kub zoo rau lub sijhawm ua haujlwm ntau yam suav nrog annealing, deposition, thiab etching. Piv txwv li, qhov ntsuas kub me me yuav muaj qhov cuam tshuam tag nrho ntawm cov chaw nyob hauv hluav taws xob ntawm cov khoom siv semiconductor.
Lawv muaj lub sijhawm ceev ceev. Semiconductor wafer ua feem ntau entails ceev ceev hloov kho. Thermocouples tuaj yeem nrhiav cov kev hloov kho sai sai, tso cai rau lub sijhawm taug qab thiab kho cov txheej txheem ua haujlwm. Qhov no yog qhov tseem ceeb rau kev khaws cov txheej txheem sib npaug thiab txwv tsis pub muaj kev puas tsuaj rau cov wafers.
Cov thermocouples zoo sib xws nrog qhov chaw huv huv. Semiconductor ntau lawm yuav siv sij hawm ib ncig ntawm lub enormously tswj cleanroom ib puag ncig kom txuag tau koj cov kab mob. Thermocouples tej zaum yuav raug tsim los ua kom zoo sib xws nrog cov chaw ib puag ncig, txo qhov txaus ntshai ntawm kev nthuav tawm cov kab mob. Tej zaum lawv yuav raug tsim los ntawm cov khoom uas tuaj yeem ua pov thawj tiv thaiv cov tshuaj lom neeg thiab tej zaum yuav tsis muaj teeb meem wiped huv si thiab sterilized.
Lawv muaj kev vam thiab ruaj khov. Semiconductor wafer processing yog ib txoj kev nyuaj thiab txhawj xeeb uas hu rau kev ntsuas qhov ntsuas kub kom ntseeg tau. Thermocouples raug lees paub rau nws qhov kev ntseeg tau thiab ua haujlwm ntev, muaj peev xwm tiv taus cov xwm txheej nyuaj thiab muab kev nyeem ntawv kub nyob rau lub sijhawm ntev. Qhov no tso cai rau kom paub tseeb qhov txuas ntxiv ntawm cov txheej txheem tsim khoom thiab txo qhov txaus ntshai ntawm kev poob qis.