Nyob rau hauv thawj theem ntawm lub tshuab nqus tsev txheej, tus nqi sputtering yog tsawg thiab cov zaj duab xis sib sau ceev yog qeeb.

Nyob rau hauv thawj theem ntawm lub tshuab nqus tsev txheej, tus nqi sputtering yog tsawg thiab cov zaj duab xis sib sau ceev yog qeeb.

Nyob rau hauv thawj theem ntawm depositing nyias films los ntawm txoj kev no, muaj ib tug series ntawm cov teeb meem xws li tsis tshua muaj sputtering tus nqi, qeeb zaj duab xis-tsim ceev, siab siab thiab inert roj yuav tsum tau teem rau lub ntaus ntawv. Yog li ntawd, txoj kev loj hlob qeeb yuav luag raug tshem tawm. Tsuas yog ib qho me me ntawm daim ntawv thov tau ua nyob rau hauv cov ntaub ntawv xws li noble hlau, refractory hlau, dielectrics thiab cov tebchaw nrog cov tshuaj muaj zog. Nws tsis yog txog thaum xyoo 1970 uas vim tias lub sijhawm zoo li magnetron sputtering, lub sputtering txheej tau tsim sai heev thiab pib nkag mus rau hauv txoj kev ntawm renaissance. Qhov no yog vim hais tias txoj kev magnetron sputtering tuaj yeem txwv cov electrons los ntawm orthogonal electromagnetic teb, uas ua rau muaj kev sib tsoo ntawm cov hluav taws xob thiab cov roj molecules, uas tsis tsuas yog txo qhov voltage thov rau cathode, tab sis kuj txhim kho cov sputtering ntawm zoo ions rau lub hom phiaj cathode. Qhov ceev txo qhov tshwm sim ntawm electron bombardment ntawm substrate, yog li txo nws cov kub, uas yog, nws muaj ob yam ntxwv ntawm kev kub ceev thiab tsis kub.

Deposition ntawm nyias films ntawm substrates los ntawm sputtering txoj kev ntawm lub tshuab nqus tsev coater

Sputtering yog ib qho tshwm sim nyob rau hauv uas them cov khoom (feem ntau zoo ions ntawm inert gas) yog siv los bombard lub nto ntawm ib tug khoom (tom qab no hu ua lub hom phiaj), yog li ua rau atoms (los yog molecules) nyob rau saum npoo ntawm lub hom phiaj kom dim ntawm. nws. Qhov tshwm sim no tau pom los ntawm Grove hauv 1842 thaum sim kawm txog qhov teeb meem ntawm cathodic corrosion, thaum cov khoom siv cathode tau tsiv mus rau phab ntsa ntawm lub tshuab nqus tsev. Lub tshuab nqus tsev coater siv txoj kev sputtering no los tso cov yeeb yaj kiab nyias ntawm lub substrate tau qhia hauv xyoo 1877.

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