Outgassing thiab Cleanliness - Qhov Teeb Meem Tsis Muaj Kabmob

Outgassing thiab Cleanliness: Qhov Kev pheej hmoo ntawm cov kab mob zais zais

Hauv ntau qhov chaw muaj kev lag luam, me me ntawm cov pa phem los ntawm lub tshuab rhaub cartridge mus tsis tau tshaj tawm. Ob peb molecules ntawm roj vapor los yog me ntsis oxide hmoov av yuav tsis hloov cov txheej txheem. Kev sib kis yog ib qho kev puas tsuaj hauv kev siv lub tshuab nqus tsev, tshwj xeeb tshaj yog cov uas cuam tshuam rau qhov chaw mos lossis cov ntaub ntawv uas muaj cov impurities tsawg heev. Ib lub tshuab cua sov tuaj yeem tso tawm cov khoom siv txaus los ua mob rau tag nrho cov khoom siv hluav taws xob semiconductor wafers lossis ua puas rau cov txheej txheem kho qhov muag.

Outgassing yog cov txheej txheem ntawm kev tso pa roj, dej vapor, thiab lwm yam khoom tsis haum uas tau nqus los ntawm cov khoom hauv lub tshuab nqus tsev. Muaj qee qhov outgassing los ntawm txhua yam khoom. Tus nqi yog nyob ntawm cov khoom siv, thaj chaw nws muaj pes tsawg, nws kub npaum li cas, thiab lub tshuab nqus tsev ntau npaum li cas. Cov ntaub qhwv ntsej muag, cov rwb thaiv tsev magnesium oxide, lub davhlau ya nyob twg ntsaws ruaj ruaj, thiab cov hlau lead hlau rwb thaiv tsev yog txhua qhov chaw uas lub tshuab cua sov tuaj yeem tawm tau.

Lub magnesium oxide rwb thaiv tsev nyob rau hauv ib tug pa cartridge rhaub tuav cov dej noo. Cov dej noo no tsis txaus ntshai ntawm huab cua siab. Thaum nws nyob hauv lub tshuab nqus tsev, nws tso tawm, uas tuaj yeem ua rau lub chamber thiab ua rau corrosion lossis hluav taws xob to. Txhawm rau tshem tawm cov dej noo ua ntej sib sau ua ke, lub tshuab nqus tsev- qib cartridge tso cua sov siv MgO uas tau ua tib zoo ua tiav los ntawm kev ci ntawm qhov kub siab hauv lub tshuab nqus tsev. Cov txheej txheem no yog qhov tsim nyog rau kev ua haujlwm qis - outgassing.

Cov ntaub qhwv tuaj yeem tso cov pa tawm. Oxides ntawm qhov chaw, cov roj siv rau kev siv tshuab, thiab cov khoom tsis huv los ntawm kev tuav tag nrho muaj lub luag haujlwm. Thaum ua lub tshuab nqus tsev twj tso kua mis, lawv yuav tsum tau ua tib zoo tu cov haujlwm, uas feem ntau suav nrog kev ntxuav ultrasonic hauv cov kuab tshuaj tshwj xeeb thiab tom qab ntawd nqus cov ci. Khaws cov khoom kom huv si kom txog thaum kev teeb tsa yooj yim yog tias koj hnav hnab looj tes huv si thiab muab tso rau hauv cov thawv kaw.

Terminal seals yog ib qho ua rau outgassing. Nyob rau hauv lub tshuab nqus tsev, cov ntaub ntawv organic xws li silicone, epoxy, lossis yas insulators tso tawm cov tshuaj tsis haum. Lub tshuab nqus tsev twj tso kua mis muaj cov ntsaws ruaj ruaj ua los ntawm ceramics, iav, los yog hlau uas muaj tsawg heev outgassing tus nqi. Cov ntsaws ruaj ruaj no tuaj yeem yog ceramic-rau-hlau, iav-rau-hlau, lossis compression seals nrog cov hlau gaskets. Cov ntsaws ruaj ruaj no raug nqi ntau dua, tab sis lawv xav tau rau lub tshuab nqus tsev huv.

Lwm qhov kev kis kab mob tuaj yeem yog qhov rwb thaiv tsev ntawm cov hlau lead. Qee cov fluoropolymer thiab PVC tsis tu ncua tuaj yeem tawm tau. Rau kev siv lub tshuab nqus tsev, nws yog qhov zoo dua los siv tshwj xeeb uas tsis tshua muaj - cov rwb thaiv tsev tawm lossis cov hlau liab qab nrog cov hlaws ceramic.

Nws yog ntsuas thiab sau cia ceev npaum li cas lub cartridge rhaub outgasses. Rau cov hauj lwm nyuaj xws li kev ua cov khoom siv hluav taws xob los yog simulating qhov chaw, cov cua sov yuav tsum tau ua kom tau raws li cov txheej txheem tawm, xws li cov teeb tsa los ntawm ASTM E595. Qhov kev sim no qhia koj tias ib yam dab tsi huv npaum li cas los ntawm kev ntsuas qhov poob ntau npaum li cas thiab ntau npaum li cas cov khoom siv condensable tau sau.

Ib qho yuam kev, raws li kev paub dhau los, yog xav tias lub tshuab cua sov uas ua haujlwm zoo hauv lub tshuab nqus tsev yuav ua haujlwm zoo ib yam ntawm lub tshuab nqus tsev siab. Raws li lub siab poob qis, tus nqi ntawm outgassing nce. Lub rhaub uas ua haujlwm ntawm 1 torr yuav tsis ua haujlwm qis dua 10⁻⁶ torr. Nws yog ib qho tseem ceeb kom phim lub tshuab cua sov rau lub tshuab nqus tsev qhov tseeb ntawm daim ntawv thov.

Nyob rau hauv luv luv, huv si thiab outgassing yog ib qho tseem ceeb heev rau lub tshuab nqus tsev cartridge rhaub. Txhua feem, los ntawm MgO rwb thaiv tsev mus rau qhov chaw sheath mus rau lub davhlau ya nyob twg ntsaws ruaj ruaj, yuav tsum tau xaiv thiab ua kom muaj tsawg outgassing. Yog tias koj xav tau lub tshuab nqus tsev ultra- huv si, koj yuav tsum siv lub tshuab cua sov uas tau sim rau kev tawm thiab muaj cov ntaub ntawv meej meej ntawm lawv cov kev ua haujlwm. Tau txais cov lus qhia tshaj lij ua kom paub tseeb tias lub rhaub dej kub koj xaiv ua tiav cov qauv kev tu lub tshuab nqus tsev uas koj xav tau.