Semiconductor Manufacturing: Ultra-Cov Kev Cai Ntshiab rau Wafer Fab Cov Cuab Yeej

Semiconductor Manufacturing: Yog vim li cas Ultra-Pure Requirements Ua los yog tawg Wafer Fab cuab yeej

Txhua tus paub txog kev tsim khoom semiconductor nkag siab txog kev nrhiav kev ua kom zoo tag nrho. Txawm tias ib qho kab mob microscopic tuaj yeem rhuav tshem tag nrho cov wafers, ua rau muaj kev puas tsuaj loj heev. Ib qho tseem ceeb, tseem ceeb, taw tes ntawm qhov tsis zoo nyob hauv cov khoom siv uas tswj hwm lub plawv ntawm cov txheej txheem: kub. Qhov no yog qhov uas tus txo hwj chimthermocouplehloov los ntawm ib qho yooj yim sensor mus rau ib feem ntawm lub hom phiaj - tseem ceeb heev.

Nyob rau hauv ultra- ib puag ncig ntshiab ntawm wafer fab, txhua qhov kev xaiv khoom tseem ceeb. Standard industrialthermocouplesthiab lawv cov ntaub ntawv sheathing cuam tshuam tuaj yeem dhau los ua qhov chaw tsis muaj kev sib kis. Outgassing, particle shedding, los yog hlau ion tsiv teb tsaws los ntawm cov khoom no tuaj yeem tso rau hauv wafers lossis tshuaj lom chamber cua. Qhov kev sib tw yog ob zaug: ua tiav qhov tseeb, txhim khu kev qha ntsuas kub thaum lav cov khoom siv sib xws thiab kev huv.

Tsis yog tag nrhothermocouplesraug tsim sib npaug rau txoj haujlwm no. Thaum lub hauv paus ntsiab lus ntawm kev ntsuas kub ntawm Seebeck nyhuv tseem nyob, lawv kev tsim kho yog qhov ua rau lawv sib nrug. Cov hom kev lag luam uas muaj hlau sheaths (xws li stainless hlau) feem ntau tsis haum rau cov txheej txheem tseem ceeb. Hloov chaw, fab- qib sensors feem ntau siv siab- cov ntaub ntawv purity xws li cov qib tshwj xeeb ntawm cov hlau tsis muaj hlau nrog cov khoom siv passivated, inconel, lossis txawm tias ceramic sheaths (xws li alumina) rau qhov chaw hnyav tshaj plaws. Qhov kev xaiv yog nyob ntawm qhov txheej txheem ntau: lub qhov cub tawg, lub tshuab hluav taws xob epitaxial, lossis lub plasma etch chamber txhua qhov qhia txog qhov kub thiab txias thiab raug tshuaj lom neeg.

Raws li kev paub dhau los hauv kev lag luam, ntawm no yog cov kev xav tseem ceeb thiab cov lus qhia tswv yim rau kev xaiv thiab tswjthermocouplesnyob rau hauv xws li xav tau chaw:

Material Compatibility yog qhov tseem ceeb:Cov ntaub ntawv sheath yuav tsum yog inert rau cov txheej txheem gases thiab kub. Piv txwv li, athermocouplenyob rau hauv lub siab -kub oxidation raj yuav tsum tiv thaiv oxidation thiab txo cov silicon noj. Kev sab laj nrog ob lub cuab yeej OEM thiab tus kws tshaj lij sensor tsis yog - sib tham.

Tsom ntsoov rau "Clean" Design:Nrhiavthermocouplestsim tshwj xeeb rau kev siv semiconductor. Cov yam ntxwv muaj xws li du, electropolished welds kom txo qis cov khoom ntxiab, hermetic seals los tiv thaiv kev tawm sab hauv, thiab kev siv ultra- siab purity ntxhia rwb thaiv tsev.

Calibration thiab Traceability:Tsis tu ncua, traceable calibration yog ntau tshaj qhov zoo tshaj plaws xyaum; nws yog qhov tsim nyog. Tsav hauvthermocouplekev nyeem ntawv tuaj yeem txhais ncaj qha rau cov txheej txheem drift. Tuav lub sij hawm calibration nruj me ntsis kom paub meej daim ntawv qhia kev sib xws thiab cov cuab yeej sib txuam thoob lub fab.

Installation thiab tuav:Txawm yog qhov zoo tshaj plawsthermocoupletuaj yeem dhau los ua tus kab mob yog tias ua tsis raug. Kev teeb tsa yuav tsum tau ua nrog cov txheej txheem huv huv, siv cov cuab yeej tsim nyog kom tsis txhob khawb lossis kis kab mob hauv lub hnab.

Thaum kawg, cov lus pom zoo tseem ceeb yog saib qhov ntsuas kub tsis yog cov khoom siv dav dav, tab sis yog qhov tseem ceeb ntawm cov khoom siv txheej txheem. Covthermocoupleyuav tsum tau teev nrog tib yam nruj raws li lub chamber liner los yog cov roj xa system. Compromising ntawm nws purity los yog specification ncaj qha txaus ntshai khoom yield.

Ua tiav cov kev xav tau tshwj xeeb no ultra- cov kev cai ntshiab feem ntau hinges ntawm kev txav mus dhau ntawm -- cov kev daws teeb meem txee. Ib yam li cov txheej txheem semiconductor sib txawv-los ntawm MEMS mus rau qib siab logic nodes-thov kom haum, cov cuab yeej txhawb nqa, suav nrog qhov ntsuas kub, xav tau lub tswv yim tsim tshwj xeeb. Qhov kev ua tau zoo tshaj plaws yog ua tiav thaum xaiv sensor thiab kev sib koom ua ke raug kho raws li qhov chaw tshwj xeeb, ua kom zoo tag nrho nrog rau qhov tshwj xeeb thermal thiab kev tiv thaiv kev tiv thaiv kev xav tau ntawm txhua lub cuab yeej tshwj xeeb thiab cov txheej txheem txheej txheem.