Daim Ntawv Thov Cartridge Heaters hauv Semiconductor Vacuum Processing Equipment

Lub lag luam semiconductor muaj cov qauv siab heev rau kev ua kom huv thiab meej npaum li cas, thiab lub tshuab nqus tsev yog qhov tseem ceeb ntawm kev ua cov khoom siv hluav taws xob (piv txwv li, wafer annealing, sputtering, etching, thiab ntim). Lub tshuab cua sov yog qhov tseem ceeb tshaj plaws ntawm cov khoom siv hluav taws xob semiconductor vim tias nws txiav txim siab seb cov khoom siv hluav taws xob puas ua haujlwm zoo li cas. Cartridge rhaub yog tam sim no cov cua kub nrov tshaj plaws rau cov khoom siv no vim tias lawv ua kom sov sai, ua haujlwm tsis tu ncua, thiab me me. Cartridge heaters siv nyob rau hauv semiconductor lub tshuab nqus tsev ua khoom siv yuav tsum tsis tsuas yog ua tau raws li cov kev xav tau ntawm lub tshuab nqus tsev vacuum, tab sis lawv kuj yuav tsum muaj peev xwm ua tau raws li kev lag luam semiconductor xav tau rau siab precision, huv si, thiab stability.

Semiconductor nqus cov khoom siv, xws li lub tshuab nqus tsev nqus tsev vacuum, cov khoom siv sputtering, thiab cov khoom siv etching, feem ntau ua haujlwm nyob rau hauv siab -nqus (siab dua 10^-}4 Pa) thiab kub (300-1200 degree) ib puag ncig. Lub tshuab cua sov yuav tsum khaws qhov kub ntawm ± 0.5 degree. Qhov no yog vim hais tias cov hluav taws xob kev ua tau zoo ntawm semiconductor wafers yog tshwj xeeb rhiab rau kub. Txawm tias me ntsis kev hloov pauv hauv qhov kub thiab txias tuaj yeem tsim teeb meem xws li tsis sib xws doping concentration, crystal flaws, thiab lwm yam teeb meem uas cuam tshuam rau qhov zoo thiab cov txiaj ntsig ntawm semiconductor chips. Cartridge rhaub tuaj yeem ua tiav cov qauv siab no vim tias lawv zoo heev ntawm kev tswj qhov kub thiab txias sib npaug.


Cartridge rhaub yog cov cua kub tseem ceeb ntawm lub tshuab nqus tsev vacuum annealing furnaces rau semiconductor wafers. Txhawm rau tshem tawm cov khoom siv lead ua tsis zoo thiab ua kom lub wafer ua haujlwm zoo dua hluav taws xob, cov txheej txheem nqus tsev vacuum xav kom lub semiconductor wafer tau sov rau qhov ntsuas kub (feem ntau 600-1000 degree) nyob rau hauv siab - ib puag ncig lub tshuab nqus tsev thiab khaws cia rau qee lub sijhawm. Nyob rau hauv cov ntaub ntawv no, cov cartridge rhaub yog feem ntau Inconel sheath cartridge heaters nrog MgO rwb thaiv tsev muab tub lim uas yog ntshiab thiab ntom heev. Inconel sheath muaj qhov ruaj khov ntawm qhov kub thiab txias thiab tiv taus corrosion, uas txhais tau hais tias nws yuav tsis oxidize los yog qias neeg nyob rau hauv siab - qhov kub ntawm lub tshuab nqus tsev. Lub siab - ntom MgO muab tub lim ua kom cov cua sov hloov mus sib npaug thiab cov rwb thaiv tsev ua haujlwm zoo, yog li lub wafer tsis kub dhau hauv ib qho chaw.

Tsis tas li ntawd, txoj kev cartridge rhaub tau teeb tsa hauv lub tshuab nqus tsev vacuum annealing furnaces yog qhov tseeb heev. Raws li kev paub dhau los, cov khoom siv hluav taws xob tso rau hauv qhov nruj thiab txawm tias nyob rau ntawm phab ntsa ntawm lub cub tawg, hauv qab, thiab sab saum toj. Txhua lub tshuab rhaub cartridge muaj nws tus kheej ntsuas kub. Lub tshuab tswj qhov kub thiab txias siv ntau - cheeb tsam kub tswj algorithm los hloov lub zog ntawm txhua lub tshuab cua sov hauv lub sijhawm. Qhov no ua kom qhov kub thiab txias hauv qhov cub chamber tsis pub dhau ± 0.5 degree. Tsis tas li ntawd, muaj qhov sib txawv ntawm 5 mus rau 10 hli ntawm txhua lub tshuab hluav taws xob kom tsis txhob muaj hluav taws xob los ntawm kev cuam tshuam rau ib leeg thiab kom paub tseeb tias cov cua sov sib npaug. Qhov ntev thiab txoj kab uas hla ntawm lub tshuab tso cua sov yog tsim kom haum rau qhov loj ntawm lub cub tawg chamber thiab semiconductor wafer. Rau loj- nplai wafer ua cov cuab yeej xws li 12-nti wafer rauv, ntev dua thiab tuab tuab cartridge rhaub yog siv los xyuas kom meej tias muaj cua sov txaus thiab txawm tias cua sov.

Cartridge rhaub yog siv nyob rau hauv semiconductor sputtering tshuab kom sov lub hom phiaj thiab lub substrate. Txhawm rau txhim kho kev ua raws li cov yeeb yaj kiab sputtered thiab qhov sib xws ntawm cov yeeb yaj kiab tuab, lub hom phiaj thiab cov txheej txheem yuav tsum tau muab tso rau hauv qhov kub thiab txias (feem ntau ntawm 300 txog 600 degree) hauv qhov siab - lub tshuab nqus tsev. Lub tshuab tso cua sov hauv cov ntaub ntawv no feem ntau yog stainless hlau sheath cartridge heaters (316L) nrog lub zog ceev ntawm 5-7 W / cm². 316L stainless hlau sheath tiv taus corrosion thiab tuaj yeem ua haujlwm nrog cov khoom siv hluav taws xob tsis zoo, suav nrog argon. Qhov tsim nyog lub zog ntom ntom ua kom lub hom phiaj thiab substrate cua sov sai sai yam tsis tau kub dhau ntawm ib qho chaw.

Cov neeg feem ntau muab cov cartridge tso rau hauv cov tshuab sputtering nyob rau hauv lub hom phiaj tuav thiab lub substrate tuav, qhov chaw uas lawv nyob ze heev rau lub hom phiaj thiab substrate kom kub hloov tau ntau dua. Siab-kub- tiv taus ceramic insulators thiab hlau sealing rings foob cov hlau lead- tawm ib feem ntawm lub tshuab cua sov. Qhov no ua rau lub sputtering chamber lub tshuab nqus tsev nruj thiab nres cov pa roj inert los ntawm kev xau. Tsis tas li ntawd, cov khoom siv hluav taws xob cartridge muaj cov khoom tiv thaiv kev tiv thaiv overheating. Yog tias qhov kub thiab txias dhau mus dhau qhov kev txiav txim siab, cov khoom siv hluav taws xob yuav raug muab tua nyob rau lub sijhawm kom khaws lub hom phiaj, substrate, thiab cov khoom siv sputtering.

Cov khoom siv hluav taws xob siv hluav taws xob siv hauv cov khoom siv hluav taws xob semiconductor yuav tsum ua raws li kev lag luam semiconductor cov qauv kev huv huv nruj. Txhawm rau kom tsis txhob muaj plua plav, roj stains, thiab lwm yam kuab paug los ntawm kev tso tawm thiab ua rau cov khoom siv hluav taws xob tsis zoo, cov ntaub qhwv lub ntsej muag yuav tsum tau polished thiab ntxuav. Txhawm rau txo qis kev hloov pauv thiab muaj kuab paug nyob rau hauv siab - qhov kub ntawm lub tshuab nqus tsev, MgO rwb thaiv tsev muab tub lim yuav tsum huv heev thiab tsis suav nrog cov kab mob txaus ntshai, xws li cov hlau hnyav. Tsis tas li ntawd, lub tshuab cua sov cartridge yuav tsum dhau qhov kev kuaj xyuas kev huv huv ua ntej lawv tawm hauv lub Hoobkas kom paub tseeb tias lawv ua tau raws li cov qauv ntawm kev lag luam semiconductor.

Lub tshuab rhaub cartridge kuj yuav tsum ruaj khov nyob rau lub sijhawm. Vim tias cov khoom siv hluav taws xob semiconductor khiav txhua lub sijhawm (24 teev hauv ib hnub, 7 hnub hauv ib lub lis piam), lub tshuab cua sov yuav tsum tau siv sijhawm ntev (ntau tshaj 8000 teev) thiab ua haujlwm tsis tu ncua. Cartridge heaters siv nyob rau hauv semiconductor lub tshuab nqus tsev ua cov cuab yeej ib txwm ua los ntawm siab - cov ntaub ntawv zoo thiab mus los ntawm ntau yam kev sim thiab tsim ua hauj lwm kom paub tseeb tias lawv yuav ua hauj lwm zoo rau lub sij hawm ntev yam tsis tas yuav tsum tau hloov ntau zaus. Kev tu lub ntsej muag tsis tu ncua thiab saib xyuas kev ua haujlwm ntawm cov khoom siv hluav taws xob ntawm lub tshuab hluav taws xob tuaj yeem pab lawv nyob ntev dua thiab ua kom cov khoom siv hluav taws xob mus ntxiv.

Nyob rau hauv luv luv, cartridge heaters yog ib qho tseem ceeb ntawm semiconductor nqus tsev ua khoom, thiab lawv cov kev ua tau zoo muaj kev cuam tshuam ncaj qha rau qhov zoo thiab tawm los ntawm semiconductor wafers. Cartridge rhaub yog zoo meej rau lub semiconductor sector vim hais tias lawv muaj peev xwm tswj tau qhov kub thiab txias precisely, tshav kub tusyees, ua hauj lwm ntseeg tau, thiab nyob twj ywm heev. Cov khoom siv sib txawv ntawm cov khoom siv hluav taws xob semiconductor, zoo li annealing furnaces thiab sputtering khoom, xav tau ntau hom cartridge heaters. Kev kho kom haum xeeb thiab kev txhawb nqa tuaj yeem pab cov tuam txhab semiconductor xaiv cov khoom siv hluav taws xob zoo tshaj plaws, ua kom cov cuab yeej ua haujlwm zoo, thiab ua kom cov khoom semiconductor zoo dua.