Lub tswv yim tseem ceeb ntawm PVD txheej ntawm lub tshuab nqus tsev coater

Lub tswv yim tseem ceeb ntawm PVD txheej ntawm lub tshuab nqus tsev coater

PVD yog daim ntawv luv luv ntawm lus Askiv 'Physical Vapor Deposition', uas txhais tau hais tias lub cev vapor deposition. Peb tam sim no feem ntau xa mus rau lub tshuab nqus tsev evaporation, sputter txheej, ion plating, thiab lwm yam raws li lub cev vapor deposition.

Cov txheej txheem PVD ntau dua yog qhov feem ntau ntawm cov arc plating thiab magnetron sputtering. Cov khoom siv multi-arc plating yog yooj yim hauv cov qauv thiab yooj yim rau kev khiav lag luam. Nws qhov chaw ion evaporation tuaj yeem siv los ntawm lub zog ntawm lub tshuab vuam hluav taws xob, thiab nws cov txheej txheem arc ignition zoo ib yam li cov khoom siv hluav taws xob. Tshwj xeeb, nyob rau hauv ib qho txheej txheem siab, lub arc ignition koob thiab evaporation ion qhov chaw yog luv luv hu thiab disconnected, kom cov pa tawm. Txij li thaum tsim ntawm multi-arc plating feem ntau yog vim qhov nruam txav arc qhov chaw, lub pas dej molten yog tas li tsim nyob rau saum npoo ntawm qhov chaw evaporation, thiab tom qab cov hlau yog evaporated, nws yog tso rau ntawm lub substrate kom tau ib tug nyias zaj duab xis. txheej. Piv nrog magnetron sputtering, nws tsis tsuas yog muaj lub hom phiaj siv cov khoom siv siab, tab sis kuj muaj qhov zoo ntawm cov hlau ionization siab thiab muaj zog sib txuas ntawm cov yeeb yaj kiab thiab cov substrate. Tsis tas li ntawd, cov xim ntawm multi-arc txheej yog qhov ruaj khov, tshwj xeeb tshaj yog thaum ua TiN txheej, txhua batch tau yooj yim tau txais tib yam ruaj khov daj daj, uas yog dhau qhov ncav cuag ntawm magnetron sputtering. Qhov tsis zoo ntawm multi-arc plating yog tias nyob rau hauv cov xwm txheej ntawm qhov kub tsis tshua muaj txheej txheej nrog cov khoom siv hluav taws xob DC, thaum txheej txheej thickness nce mus txog 0.3μm, tus nqi deposition yog ze rau qhov kev xav, thiab cov zaj duab xis tsim ua heev. nyuaj. Tsis tas li ntawd, zaj duab xis nto pib hazy. Lwm qhov tsis zoo ntawm multi-arc plating yog vim tias cov hlau yog evaporated tom qab melting, cov khoom tso tawm loj dua, qhov ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom.

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