Kev sib kis ntawm lub tshuab nqus tsev txheej tshuab txais cov lus qhia sib nqus kom ntseeg tau tias kev ruaj ntseg ntawm kev sib kis.

Kev sib kis ntawm lub tshuab nqus tsev txheej tshuab txais cov lus qhia sib nqus kom ntseeg tau tias kev ruaj ntseg ntawm kev sib kis.

1) Cov khoom siv ntawm lub tshuab nqus tsev chamber yog SUS304, sab hauv phab ntsa ntawm lub tshuab nqus tsev yog polished, thiab sab nrauv phab ntsa yog polished thiab ces hlaws-blasted.

2) Lub tshuab nqus tsev yog sib cais los ntawm lub rooj vag ywj pheej - lub flapper valve, uas tuaj yeem ua tiav kev sib cais zoo thiab ruaj khov ntawm cov khoom siv roj. Tam sim no peb lub tuam txhab xaiv lub nrov plig plawg valve tsim, uas muaj cov nyhuv sealing zoo heev thiab muaj zog ntau dua li cov tam sim no hauv tsev nrov nrov plig plawg valve.

3) Kev sib kis tau txais cov lus qhia sib nqus los xyuas kom muaj kev ruaj ntseg ntawm kev sib kis. Qhov ceev ntawm txhua ntu ntawm tag nrho cov kab ntau lawm yog tsav los ntawm qhov sib txawv ntawm qhov kev tswj hwm lub cev muaj zog, thiab kev khiav ceev tuaj yeem hloov kho.

4) Kev tswj hluav taws xob ntawm lub tshuab nqus tsev electroplating: kov lub vijtsam thiab PLC tsis siv neeg tswj, tus txiv neej-tshuab sib tham txoj kev ua kom tiav cov ntaub ntawv tso saib, kev ua haujlwm thiab kev tswj hwm ntawm lub kaw lus

Txhua yam khoom tuaj yeem raug sputtered ntawm lub tshuab nqus tsev txheej

Tam sim no qhov ceev ntawm ib txwm glow paug muaj feem xyuam rau cov khoom siv cathode thiab cov duab, roj siab thiab lwm yam. Nws yuav tsum tau khaws cia kom ruaj khov li sai tau thaum sputtering. Txhua yam khoom tuaj yeem raug sputtered, txawm tias cov ntaub ntawv melting siab tuaj yeem yooj yim sputtered, tab sis xov tooj cua zaus (RF) lossis mem tes (mem tes) sputtering yuav tsum tau rau cov hom phiaj uas tsis yog tus neeg xyuas pib; thiab vim tsis zoo conductivity, sputtering zog thiab ceev yog kuj siab. Tsawg. Hlau sputtering zog mus txog 10W / cm2, tsis yog hlau<5W/cm2

Nqus coater etching thiab txheej

Qhov saum npoo ntawm cov khoom yog bombarded nrog cov nqi them nrog kaum ntawm electron volts los yog siab dua kinetic zog, thiaj li hais tias nws sputters tawm mus rau lub roj theem, uas yuav siv tau rau etching thiab txheej. Tus naj npawb ntawm atoms sputtered los ntawm qhov xwm txheej ion hu ua sputtering yield. Qhov siab dua qhov tawm los, qhov ceev ntawm sputtering ceev. Cu, Au, Ag yog siab tshaj, thiab Ti, Mo, Ta, W yog qis tshaj. Feem ntau 0 1-10 atoms/ion. Cov ions tuaj yeem tsim DC glow tawm. Thaum lub tshuab nqus tsev kawm ntawv qib siab ntawm 10-1-10 Pa, qhov hluav taws xob siab yog siv nruab nrab ntawm ob tus ncej los ua kom muaj paug tawm. Cov ions zoo yuav ua rau lub hom phiaj tsis zoo thiab ua rau lub hom phiaj, thiab plated kom txog thaum nws tau plated. ntawm yam.

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