Vacuum Coater Film Uniformity Concept

Vacuum Coater Film Uniformity Concept

1. Lub uniformity nyob rau hauv thickness kuj yuav to taub li roughness. Ntawm qhov ntsuas ntawm cov yeeb yaj kiab kho qhov muag (uas yog, 1/10 wavelength raws li ib chav tsev, txog 100A), qhov sib xws ntawm lub tshuab nqus tsev yog qhov zoo heev, thiab qhov roughness tuaj yeem yooj yim tshem tawm. Kev tswj hwm qib yog nyob rau hauv 1/10 ntawm lub wavelength ntawm pom lub teeb, uas txhais tau hais tias tsis muaj kev cuam tshuam rau cov khoom siv kho qhov muag ntawm cov yeeb yaj kiab. Txawm li cas los xij, yog tias nws hais txog qhov tsis sib xws ntawm cov txheej txheem atomic, uas yog hais, kom ua tiav 10A lossis txawm tias 1A nto flatness, cov kev tswj tshwj xeeb yuav raug piav qhia hauv qab no raws li cov txheej txheem sib txawv.

2. Uniformity ntawm cov tshuaj muaj pes tsawg leeg: Yog hais tias, nyob rau hauv cov zaj duab xis, lub atomic muaj pes tsawg leeg ntawm cov compound yuav yooj yim tsim uneven yam ntxwv vim lub me me. Yog hais tias txheej txheej ntawm SiTiO3 zaj duab xis yog unscientific, muaj pes tsawg leeg ntawm qhov tseeb nto yuav tsis zoo ib yam. Nws tsis yog SiTiO3, tab sis tej zaum yuav yog lwm qhov sib piv. Cov zaj duab xis txheej tsis yog cov tshuaj muaj pes tsawg leeg ntawm cov yeeb yaj kiab uas xav tau, uas tseem yog cov ntsiab lus ntawm lub tshuab nqus tsev.

3. Uniformity ntawm lattice xaj: Qhov no txiav txim siab seb cov yeeb yaj kiab yog ib qho siv lead ua, polycrystalline lossis amorphous, uas yog qhov teeb meem kub hauv lub tshuab nqus tsev.

Nqus txheej tshuab pob cim txoj kev

Cov txheej txheem pob cim kuj yog ib txoj hauv kev "zoo" rau kev ntsuas lub zog sib txuas ntawm zaj duab xis puag. Thaum cov txheej txheej yog tiaj tus) lossis elliptical (thaum txheej txheej yog cylindrical) pits.

Thaum sib tsoo, koj yuav tsum paub nws zoo, thiab qhov tob ntawm lub qhov yuav tsum tshaj qhov tuab ntawm txheej. Tsis tas li ntawd, vim hais tias cov txheej yog nyuaj heev. Lub pob steel tsis yooj yim rau hnav los ntawm cov txheej txheem ncaj qha, yog li thaum sib tsoo, ua ntej siv me ntsis pob zeb diamond hmoov (nrog qhov me me hauv qab 7um) ntawm qhov sib tsoo ntawm lub pob steel, thiab tsuag dej cawv kom dilute lub pob zeb diamond hmoov thiab lubricate thaum lub sij hawm. sib tsoo.

Hauv qab lub iav tsom iav tsom iav, ua kom pom lub qhov taub 50-100 zaug. Koj yuav pom ib txoj kab decomposition ntawm txheej txheej thiab substrate. Ua tib zoo saib cov duab ntawm cov kab sib faib no los txiav txim seb lub zog sib txuas ntawm cov txheej thiab cov substrate puas zoo lossis tsis zoo. Yog hais tias kab no meej heev thiab zoo huv si. Cov txheej adhesion yog zoo. Yog hais tias qhov kev faib kab no yog canine-hla los yog faulted, lub txheej adhesion tsis zoo.

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