Lub tshuab nqus tsev yuav tsum muaj qhov evaporation los yog lub hom phiaj evaporation
Tso lus
Lub tshuab nqus tsev yuav tsum muaj qhov evaporation los yog lub hom phiaj evaporation
Ntau yam txheej txheem txheej txheem yuav tsum muaj qhov chaw evaporation lossis lub hom phiaj los hloov cov evaporated zaj duab xis-tsim hom rau hauv cov roj. Nrog cov peev txheej nce ntxiv lossis cov hom phiaj, kev xaiv cov khoom siv ua yeeb yaj kiab nthuav dav heev. Txawm hais tias nws yog hlau, alloy, compound, ceramic lossis organic teeb meem, ntau cov yeeb yaj kiab hlau thiab cov yeeb yaj kiab dielectric tuaj yeem ua rau vapor-deposited, thiab cov ntaub ntawv sib txawv tuaj yeem ua rau vapor-deposited ib txhij kom tau txais cov yeeb yaj kiab ntau.
Nqus txoj kev tshuab tsis sib npaug magnetron sputtering tshuab
Yog li ntawd, lub tshuab magnetron txheej tuaj yeem tso tawm hauv qab ua haujlwm qis thiab qhov hluav taws xob, thiab lub hom phiaj siv tus nqi kuj siab. Txawm li cas los xij, lub substrate cheeb tsam yog tsawg bombarded los ntawm ions vim hais tias cov electrons txav raws cov magnetic teb kab thiab feem ntau yog nyob rau hauv lub hom phiaj nto. Lub tswv yim ntawm unbalanced magnetron sputtering thev naus laus zis txhais tau hais tias cov hlau nplaum sib nqus ntawm cov hlau nplaum sab nraud ntawm magnetron cathode loj dua li ntawm cov hlau nplaum sab hauv, uas yog hais tias, cov kab hlau nplaum ntawm ob txoj kab hlau nplaum yuav tsis raug kaw tag. ntawm lub hom phiaj nto, thiab muaj ib qho kev faib ua feem ntawm cov magnetic teb kab. Nws yuav txuas ntxiv raws ntug ib feem ntawm lub hom phiaj mus rau thaj tsam substrate, yog li ntawd ib feem ntawm cov hluav taws xob tuaj yeem txuas mus rau lub substrate raws cov kab hlau nplaum sib nqus, yog li ua kom cov ntshav ceev thiab cov roj ionization hauv thaj tsam substrate. Txawm hais tias qhov sib npaug tsis sib npaug, yog tias cov hlau nplaum nyob ruaj ruaj, nws cov yam ntxwv ntawm cov hlau nplaum yuav txiav txim siab qhov kev siv lub hom phiaj ntawm tsawg dua 30 feem pua. Kev sib hloov magnetic teb tuaj yeem siv los txhim kho kev siv lub hom phiaj. Yog hais tias lub rotating magnetic teb xav tau ib tug rotating mechanism, ces tus sputtering tus nqi yog txo. Rotating magnetic teb feem ntau yog siv rau cov hom phiaj loj lossis muaj txiaj ntsig. Piv txwv li, sputtering ntawm semiconductor nyias films. Rau cov khoom siv me me thiab cov khoom siv dav dav, cov khoom siv hlau nplaum zoo li qub tau siv dav.
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