Dab tsi yog Daim Ntawv Thov ntawm PTFE Heat Exchangers hauv Semiconductor Wafer Cleaning (RCA Clean)?

Cov pa wafer tu ib ntus, RCA huv, ntiav cov kev daws teeb meem, SC1 thiab SC2, ntawm qhov kub thiab txias kom tshem tawm cov kab mob hlau thiab cov khoom. Cov khoom siv hluav taws xob uas tswj cov chav da dej kub no yuav tsum qhia xoom ntxiv cov hlau tsis huv lossis kev ua haujlwm tu tag nrho raug cuam tshuam.

RCA Cov txheej txheem ntxuav
RCA cov txheej txheem huv si yog ib theem tseem ceeb hauv kev tsim cov semiconductor wafers, uas muaj ob txoj kev ntxuav, SC1 (ammonium hydroxide, hydrogen peroxide thiab dej) thiab SC2 (hydrochloric acid, hydrogen peroxide thiab dej). Ob qho kev daws teeb meem ua haujlwm ntawm 70-80℃thiab muaj lub luag haujlwm sib txawv hauv kev tshem tawm cov kab mob:

SC1 Tshuaj: Ib qho kev daws teeb meem oxidising, feem ntau yog siv rau kev tshem tawm cov pa phem thiab cov khoom siv. Qhov kub thiab txias ib puag ncig guarantees kev tu kom zoo, degrading organic residues thiab hais tias tej zaum yuav txuas rau ntawm wafer nto.

SC2 Kev daws: Cov tshuaj no yog siv los tshem tawm cov hlau ions los ntawm wafer nto. Kev sib tov ntawm hydrochloric acid thiab hydrogen peroxide muab cov tshuaj reactivity tsim nyog los yaj thiab tshem tawm cov hlau impurities los ntawm lub wafer, tawm hauv ib tug huv si nto rau cov txheej txheem tom ntej.

Ob qho SC1 thiab SC2 cov kev daws teeb meem yog corrosive thiab oxidising, yog li cov tshuab yuav tsum muaj zog txaus los tiv thaiv cov cheeb tsam no thiab tsis txhob kis kab mob los ntawm cov khoom siv hluav taws xob uas ua rau lawv kub.

RCA Ntxuav siv PTFE Thaum tshav kub kub Exchangers
Vim tias muaj cov tshuaj tiv thaiv zoo heev ntawm SC1 thiab SC2 cov kev daws teeb meem, cov khoom siv hluav taws xob siv hauv daim ntawv thov no yuav tsum tau ua los ntawm fluoropolymers xws li PTFE lossis PFA uas muab cov tshuaj tiv thaiv tshwj xeeb. Cov kev sib pauv no yog siv los tswj qhov kub ntawm cov kev daws teeb meem, ua kom lawv nyob rau hauv qhov kev ua haujlwm uas yuav tsum tau ua thiab tswj xyuas qhov kev ntseeg siab ntawm cov txheej txheem ntxuav.

Sab Nraud Recirculation Loops: PTFE lossis PFA cov khoom siv hluav taws xob yog siv nyob rau hauv lub voj voog rov qab los ua kom sov lossis txias rau SC1 thiab SC2 cov kev daws teeb meem raws li xav tau. Qhov no kaw - txheej txheem voj voog kom ruaj khov kho qhov kub thiab txias yam tsis muaj kev qhia txog cov hlau ions rau cov tshuaj los ntawm cov txheej txheem cua sov / cua txias.

Inert Properties: PTFE thiab PFA kub exchangers yog tag nrho inert, yog li tsis muaj ions yog leached rau hauv cov tshuaj txawm nyob rau ntawm qhov chaw ib trillion nrhiav kom tau txwv ntawm lub semiconductor ntau lawm ib puag ncig. Qhov no yog ib qho tseem ceeb los xyuas kom meej qhov kev ncaj ncees ntawm cov txheej txheem wafer tu, qhov twg cov hlau paug tuaj yeem ua rau cov khoom siv poob ntau.

Nyob rau hauv sophisticated semiconductor fabs qhov twg cov pob nyiaj sib kis tau ntsuas nyob rau hauv atoms ib square centimeter, ion- dawb hloov cov kev daws teeb meem yog qhov xav tau. Tsuas yog cov fluoropolymer raws li kev sib pauv tuaj yeem ua tiav cov qauv nruj no thiab xyuas kom meej tias RCA cov txheej txheem huv yuav ua tiav yam tsis ntxiv cov impurities tshiab rau saum npoo wafer.

Khoom Qib
Tsuas yog qib siab purity PTFE los yog PFA yuav tsum tau siv nyob rau hauv lub tsev ntawm cov cua kub exchangers rau siv nyob rau hauv semiconductor daim ntaub ntawv. Cov ntaub ntawv no ua tau raws li qhov xav tau siab tshaj plaws hais txog tshuaj tiv thaiv thiab purity. Tsis muaj cov khoom los yog ions raug tso rau hauv chav da dej. Xws li cov tsis yog - semiconductor qib fluoropolymers tej zaum yuav muaj impurities los yog kuab paug uas yuav ua rau tsis zoo rau cov txheej txheem ntxuav.

Xaus
PTFE / PFA tshav kub exchangers yog ib qho tseem ceeb rau RCA cov txheej txheem huv si los xyuas kom meej qhov kub thiab txias ntawm SC1 thiab SC2 cov kev daws teeb meem dawb los ntawm cov hlau tsis huv. Cov exchangers tam sim no pab txhawb rau kev txhim kho ntawm cov khoom 'yield thiab qhov zoo ntawm kev tsim tau los ntawm kev ua kom lub purity ntawm wafer nto. Raws li kev lag luam semiconductor txuas ntxiv mus rau cov thev naus laus zis ntau ntxiv, qhov xav tau ntawm cov khoom siv purity siab tshaj plaws ntawm txhua theem ntawm kev tsim khoom, suav nrog kev tu wafer, tseem yog qhov tseem ceeb rau kev ua tiav.