Dab tsi yog kev txhawb zog sai? Txhim kho Semiconductor kev ua tau zoo los ntawm precision tshav kub kho

Kev siv hluav taws xob sai sai, RTA) lossis cov khoom siv hluav taws xob sai sai (RTT} Cov khoom siv kub kub cov khoom siv Microstructure thiab txhim kho nws cov khoom siv hluav taws xob thiab cua txias rau kev kho kom sai, txo qis sab hauv kev ntxhov siab, thiab txhim kho cov khoom siv sib txuas thiab hluav taws xob cov khoom .

Cov Ntsiab Lus Tseem Ceeb:
Dab tsi yog kev txhawb zog sai? Txhim kho Semiconductor kev ua tau zoo los ntawm precision tshav kub kho
Cov ntsiab lus thiab lub hom phiaj ntawm cov nyiaj pab sai sai:

Txheej Txheem Ceev Ceev (RTA) yog qhov kev kho cua sov kub siv los hloov cov ntaub ntawv micrictructure, tshwj xeeb yog silicoductor manufacturing.
Nws lub hom phiaj tseem ceeb yog txhawm rau txhim kho hluav taws xob cov khoom, kho cov kev tsis meej, thiab txo cov khoom siv sab hauv kev ntxhov siab hauv kev ntxhov siab {}}
Kub thiab nrawm:

RTA ua kom sov cov khoom siv rau qhov kub tshaj ntawm 1 000 degree.
Cov txheej txheem cua sov tsis tshua muaj zog, feem ntau ua tiav rau ob peb feeb lossis tsawg dua, ua raws li los ntawm kev txias nrawm rau {}}
Qhov kev ceev no RTA sib nrug los ntawm cov txheej txheem anealing uas muaj cua sov thiab cua txias txias rau .
Cov ntawv thov hauv semiconductor raug:

RTA yog dav siv nyob rau hauv semiconductor ntau lawm los txhim kho kev ua tau zoo ntawm silicon wafers .
Nws pab kom cov dopants, kho cov kev puas tsuaj los ntawm kev puas tsuaj, thiab txhim kho qhov zoo ntawm cov khoom siv .
Hloov microstruction):

Thaum lub sij hawm RTA cov txheej txheem, cov khoom siv Crystal cov qauv ua kua dej-zoo li, tso cai rau qhov tsis xws luag rau tus kheej-kho {}}
Txheej txheem txias txias ua rau cov qauv grain ntau yam thiab ua kom zoo nkauj, uas txhim kho kev ua kom tau zoo thiab txo cov hardness {}}
Qhov zoo ntawm kev txhawb nqa sai sai:

Txhim kho cov khoom siv hluav taws xob: Txhim kho qhov kev coj zoo thiab kev ua tau zoo ntawm cov ntaub ntawv semiconductor .
Ntxhov siab nyem: txo cov kev ntxhov siab sab hauv uas yuav ua rau cov khoom tsis ua haujlwm .
Ductility thiab machinability: ua rau cov khoom siv ntau rau kev ua ntxiv, xws li machining lossis txias ua haujlwm .
Sib piv nrog cov kev sib xyaw ua ntej:

Cov kev txhawb nqa kev ua pa cuam cuam tshuam nrog kev ua haujlwm qeeb qeeb thiab cua txias Cycles, ua rau nws tsim nyog dua rau cov kev lag luam nrawm nrawm nrawm.
Qhov ceev thiab qhov tseeb ntawm RTA ua rau nws zoo tagnrho rau niaj hnub tsim cov txheej txheem uas yuav tsum muaj cov sijhawm heev thiab precision.
Cov Khoom Siv Kom Haum:

Thaum RTA yog feem ntau siv rau silicon wafers, nws tuaj yeem siv rau cov ntaub ntawv thiab cov khoom siv thiab cov ceracics, kom ua tiav txoj kev hloov mic {}}
Txheej Txheem Tswj thiab Kho:

Kev ua kom sai thermal yuav tsum muaj qhov ntsuas kub thiab sijhawm kom ua tiav cov khoom xav tau .
Cov khoom siv siab heev xws li cov cua sov kev ua hluav taws xob ua kom muaj kev sib xws, kom muaj tseeb .
Cov kev sib tw thiab kev saib xyuas:

Cua sov ceev thiab cua txias tuaj yeem tsim thermal ntxhov siab yog tias tsis yog tswj kom zoo .
Ua tib zoo saib yuav tsum kom tsis txhob muaj cov khoom puas lossis tsis sib xws .
Yav Tom Ntej:

Raws li semiconductor cuab yeej siv txuas ntxiv mus ntxiv, qhov kev thov rau cov txheej txheem sai sai xws li RTA yuav tsum cog .
Kev nce qib hauv RTA thev naus laus zis yuav ua rau nrawm dua thiab muaj txiaj ntsig kev kho cua sov {}}
Los ntawm kev nkag siab cov ntsiab lus no, khoom siv thiab cov khoom yuav khoom yuav ntsuas tau qhov kev ua tiav sai sai rau cov txheej txheem sai sai