Lub luag hauj lwm dab tsi ua Fluoropolymer Exchangers ua si hauv Recycling High -Purity Water for Semiconductor Fabs?
Tso lus
Semiconductor fabs siv ntau qhov dej ultrapure (UPW). Cov txheej txheem rov ua dua dej yog qhov kev xav tau ntawm kev lag luam thiab ib puag ncig tab sis cov khoom siv hluav taws xob sib hloov hauv cov voj voog rov ua dua yuav tsum tsis txhob cuam tshuam cov dej zoo. Kev sib kis ntawm UPW system tuaj yeem tshwm sim los ntawm ib qho hlau ion spike thiab cuam tshuam rau qhov zoo ntawm wafers thiab tag nrho cov txheej txheem ntau lawm. Fluoropolymer heat exchangers yog qhov tseem ceeb rau kev tswj xyuas qhov purity ntawm cov siab - dej huv huv, tiv thaiv kev rov ua dua ntawm ions lossis cov khoom siv thoob plaws hauv cov txheej txheem rov ua dua.
Vim li cas UPW Recycling tseem ceeb hauv Semiconductor Fabs
UPW yog dav siv nyob rau hauv semiconductor manufacturing wafer tu, txias thiab ntxuav. Cov txheej txheem no yog dej siv zog, yog li fabs muaj cov voj voog rov qab los rov qab siv dej, txo cov nqi thiab kev cuam tshuam ib puag ncig. Yaug cov dej los ntawm kev ntxuav wafer yog sau, lim thiab xa rov qab mus rau qhov system. Txawm li cas los xij, cov dej rov qab feem ntau xav tau cua sov lossis cua txias kom ua tau raws li cov txheej txheem yuav tsum tau siv dua, piv txwv li, ua ntej rov- polishing lossis ntxuav ntxiv.
Cov kab kawg ntawm kev tiv thaiv kev kis kab mob hauv lub voj voog rov ua dua no yog cov khoom siv hluav taws xob sib txawv. Lawv yuav tsum ua kom cov dej ntshiab ntawm txoj kev, yog li tsis muaj cov hlau ions lossis cov khoom tawg tau rov qab mus rau hauv lub cev uas tuaj yeem cuam tshuam cov dej tsis kam thiab ua rau muaj kab mob hauv cov kauj ruam tom ntej.
Kev siv cov Fluoropolymer Thaum tshav kub kub Exchangers
Ua kom Purity nyob rau hauv Recycling Cycle
Fluoropolymer heat exchangers yog tsim los kom haum rau cov kev xav tau ntawm siab -purity water recycling nyob rau hauv semiconductor fabs. Kev xaiv ntawm PFA (perfluoroalkoxy) thiab PTFE (polytetrafluoroethylene) cov ntaub ntawv yog raws li lawv cov tshuaj resilience thiab inertness, uas tsim nyog kom tsis txhob muaj leaching ntawm cov kab mob mus rau hauv cov dej reclaimed. Cov ntaub ntawv no yog inert tag nrho thiab tsis tso cov hlau ions los yog cov khoom mus rau hauv dej, uas yog ib qho tseem ceeb kom tswj tau qhov 18 megaohm -centimeter resistivity yuav tsum tau los ntawm semiconductor cov qauv kev lag luam.
Cov khoom siv hluav taws xob hloov pauv hauv lub voj voog rov ua dua yog txhua yam -PFA lossis PTFE plhaub- thiab - raj sib hloov, yog li muab cov hlau - dawb nto uas tsis cuam tshuam rau cov dej zoo. Qhov no ua kom ntseeg tau tias UPW rov qab tau ua tiav cov lus qhia nruj ntawm SEMI F63, uas txhais tau hais tias cov kev cai huv huv rau cov dej siv hauv kev tsim cov microelectronics.
Qhov zoo ntawm Fluoropolymer Exchangers
Inertness thiab Chemical Compatibility Fluoropolymer exchangers yog resistant rau ntau yam chemicals thiab acids niaj hnub ua hauj lwm nyob rau hauv semiconductor ua hauj lwm. Lawv tsis kam rau cov tshuaj hnyav yam tsis muaj kev puas tsuaj pab khaws cov khoom zoo ntawm UPW thoob plaws hauv cov txheej txheem rov ua dua.
Zero Ion los yog Particle Release: Fluoropolymer exchangers tsis tso cov hlau ions los yog tso tawm, uas yog ib qho tseem ceeb rau siab -purity dej systems uas yuav tsum tau ultra- tsawg ionic thiab particulate paug theem. Qhov kev ua haujlwm no ua kom ntseeg tau tias cov dej tiv thaiv tau khaws cia ntawm qhov zoo tagnrho.
Durability Fluoropolymers yog cov kav ntev thiab corrosion-resistant, muab kev cia siab ntev ntev ntawm cov khoom siv hluav taws xob hauv cov khoom siv hluav taws xob semiconductor. Tsis muaj kev xeb, yog li cov cuab yeej siv tau ntev dua thiab xav tau kev saib xyuas tsis tu ncua, uas yog qhov tseem ceeb rau kev ua haujlwm ntawm cov tshuab rov ua dua tshiab.
Purity Requirements rau Semiconductor UPW Systems
Cov dej siv hauv cov khoom siv hluav taws xob semiconductor yuav tsum muaj qhov tshwj xeeb zoo. Lub resistivity ntawm cov dej yuav tsum siab tshaj 18 megaohm -centimeter thiab ionic thiab particle contamination yuav tsum tsawg. Raws li SEMI F63, tus qauv rau microelectronics dej, nws yuav tsum tsis muaj ntau yam kab mob thiab cov hlau ions uas tuaj yeem cuam tshuam rau cov txheej txheem tsim khoom semiconductor.
Fluoropolymer cov ntaub ntawv tiv thaiv leaching hlau ions thiab particulates ua fluoropolymer tshav kub exchangers tus qauv kub rau kev txhawb nqa cov purity theem nyob rau hauv siab -purity dej systems.
Purity Requirements
Purity ntawm UPW yog qhov tseem ceeb hauv semiconductor fabs. Cov dej yuav tsum ua raws li cov cai hauv qab no:
Resistivity: Ntau dua los yog sib npaug rau 18 Megaohm-cm
Total Organic Carbon (TOC):<50 parts per billion
Particle Count Particle loj txwv (xws li Loj dua los yog sib npaug rau 0.1 µm) yog nruj
Ionic Contamination: Cov kab ntau ntawm cov hlau ions xws li sodium, potassium thiab calcium yuav tsum raug tswj.
Fluoropolymer heat exchangers yog qhov tseem ceeb kom ua tau raws li cov kev cai no vim lawv muaj kev sib cuag tsis zoo ntawm cov dej hloov hluav taws xob thiab cov dej purity siab. Lawv tiv thaiv kev kis kab mob los ntawm kev rov ua dua cua sov thiab cua txias theem uas ua kom cov dej huv.
Cov ntsiab lus
Hauv semiconductor fabs, fluoropolymer heat exchangers yog qhov tseem ceeb rau siab -purity water recycling systems. Cov exchangers tsis txhob kis cov hlau ions thiab hais, yog li cov dej ultrapure recycled muaj peev xwm ua tau raws li qhov xav tau heev resistivity thiab purity qauv. Fluoropolymer exchangers pab sustainability nyob rau hauv semiconductor ntau lawm, ua kom zoo ntawm cov dej kom zoo li fabs tuaj yeem siv cov dej tsis muaj kev cuam tshuam rau kev ncaj ncees ntawm lawv cov txheej txheem. Kev nce qib ntawm cov khoom siv hluav taws xob semiconductor tsuas yog tsav cov kev xav tau ntxiv rau kev ua haujlwm siab -kev ua haujlwm dej. Xaiv cov ntaub ntawv tsim nyog rau cov khoom siv hluav taws xob sib hloov yog qhov tseem ceeb hauv kev tswj xyuas lub sijhawm ntev - kev ua tau zoo thiab purity ntawm lub cev.
