Thaum Tshav Kub Anhydrous Hydrogen Chloride (HCl) Gas (150℃, 10 bar) rau Semiconductor Chamber Cleaning, PFA Lub Rhaub Li Cas rau HCl Permeation Piv Ntawm Extruded thiab Thaum tshav kub kub-Shrunk Liners Siv Permeation Cells ntawm Siab Siab?

Qhov Kev Sib Tw Permeation hauv Anhydrous HCl Gas Rhaub
Anhydrous hydrogen chloride gas ntawm 150℃thiab 10 lub siab yog siv rau kev ntxuav semiconductor chamber. Hlau cores raug tawm tsam los ntawm HCl nkag mus rau hauv PFA cov cua sov hauv qhov kev pabcuam no. Cov txheej txheem tsim cov txheej txheem (extruded vs. heat-shrunk) cuam tshuam cov permeation kuj. Vim yog homogeneous phab ntsa tuab thiab tsis tshua muaj kev ntxhov siab, cov cua sov-shrink liners qhia 60% tsawg HCl infiltration dua li cov ntaub ntawv extruded, txuas lub neej ntawm lub cua sov los ntawm rau lub hlis mus rau ob lossis ntau xyoo, raws li kev tshawb fawb ntau los ntawm yim lub chaw tsim khoom semiconductor.

Methodology rau Permeation Cell Test
Permeation cells nthuav tawm PFA cov qauv (2.0mm phab ntsa) rau 100% HCl roj ntawm 150 degree, 10 bar ntawm ib sab, nrog helium cheb rau sab nraud. HCl concentration hauv cheb gas ntsuas siv ion chromatography. Kev kuaj pom pom qhov tsis sib xws loj ntawm txoj kev tsim khoom:

Liner Type Phab Ntsa Thickness Variation (TIR) ​​Residual Stress (MPa) HCl Permeation Rate (mg/cm²·day) Lub Sijhawm rau Core Corrosion (teev) Kev Pabcuam Lub Neej (hli ntawm 24/7)
Extruded (tus qauv) ± 0.15mm 8.5 (tensile) 0.28 2, 500 6 Extruded (annealed) ± 0.12mm 5.2 (tensile) 0.22 3, 200 8 Thaum tshav kub kub- shrink (standard) ± 0.05mm 3.}) {1{ compressive
Thaum tshav kub kub-shrink (annealed) ± 0.04mm 2.0 (compressive) 0.09 8, 000 20
Thaum tshav kub kub-shrink (siab crystallinity) ± 0.04mm 2.5 (compressive) 0.07 10, 000+
Variations nyob rau hauv Permeation Mechanisms
Vim tias lawv cov cua txias sai sai tom qab extrusion, extruded liners muaj qhov seem loj dua tensile nro, uas ua rau microvoids uas maj nrawm qhov nqus ntawm HCl. Thaum tshav kub kub- cov hlua khi tau nthuav dav thiab ua rau cov cores tom qab pib ua cov raj extruded. Los ntawm kev ua qhov no, qhov seem seem raug tso tawm thiab compressive hoop stress yog tsim, uas kaw microvoids. Tsis tas li ntawd, cov cua sov-shrink liners tshem tawm cov cheeb tsam nyias uas nkag mus tau zoo los ntawm kev muaj phab ntsa tuab dua qub (± 0.05mm vs. ± 0.15mm).

Cov teebmeem ntawm qhov kub thiab txias
Permeation tus nqi yog tib yam ntawm 150℃thiab 10 bar. Thaum tshav kub kub- lub neej txo qis mus rau yim lub hlis ntawm 180℃(mob siab), thaum permeability triples rau txhua hom liners. Ntawm 120 degree, permeability txo qis los ntawm 60%, nce cua sov- txo qis lub neej dhau 5 xyoos. Permeation kuj cuam tshuam los ntawm lub siab; tus nqi yog 30% ntau dua ntawm 15 bar thiab 40% qis dua ntawm 5 bar.

Kev sib cuam tshuam ntawm Phab Ntsa Thickness thiab Liner Hom
Thaum tshav kub kub- cov hnab ntim cov hnab ntim khaws cia cov yam ntxwv zoo ib yam thoob plaws ntau qhov tuab. Rau 2.0mm phab ntsa, kev ua tau zoo li saum toj no. Rau 1.5mm tshav kub-shrink liners, permeability nce mus rau 0.15 mg / cm²·hnub, tseem zoo dua 2.0mm extruded (0.28). Rau 3.0mm tshav kub-shrink, permeability qis dua rau 0.05 mg/cm²·hnub, ua rau 5+ xyoo lub neej.

Kev xaiv cov khoom siv tseem ceeb
Permeated HCl sai corrodes feem ntau hlau. Rau cov cua sov-shrink liners nrog nkag ntawm 0.07-0.12 mg / cm²·hnub:

Compatibility nrog tshav kub-Shrunk Liner Incoloy 825 0.08 Core Hlau Corrosion Rate (mm/xyoo) ntawm 150℃nrog Permeated HClGood (ntau tshaj peb xyoos)
C-276 Hastelloy 0.02Zoo heev (5+ xyoo)
Qib 2 titanium 0.15 (pitting) Tantalum<0.001 is poor.Excellent (10+ years)
Manufacturing Quality Control
Thaum tshav kub kub- cov ntaub qhwv lub ntsws xav tau kev tswj xyuas qhov txias (5℃/ min) thiab qhov ntsuas kub npaum li cas thaum lub sijhawm shrinking (320℃± 5℃). Kev ntxhov siab nyob hauv yuav rov ua dua los ntawm kev tswj xyuas tsis zoo thaum tshav kub kub-shrinking. Cov neeg muab khoom yuav tsum tau lees paub:

Phab ntsa thickness TIR (laser ntsuas) <0.05 mm

Compressive residual stress <3 MPa (photoelastic)

100% txim kuaj pom tsis muaj pinholes.

Cov lus qhia rau Anhydrous HCl Service Specifications
Rau anhydrous HCl roj ntawm 150 degree, 10 bar, qhia cov cua sov-shrink PFA liners nrog post-shrink annealing (160 degree, 4h) thiab phab ntsa thickness 2.0mm yam tsawg kawg nkaus. Yuav tsum tau ntawv pov thawj ntawm HCl permeation hauv qab 0.10 mg / cm² · hnub ntawm 150 degree, 10 bar. Xaiv Hastelloy C-276 cores thiab 2.5mm phab ntsa rau peb-xyoo lossis ntev dua kev ua neej nyob rau qhov txuas ntxiv, puag ncig-- moos semiconductor chamber tu (8000 teev ib xyoos ib zaug). Hauv kev pabcuam HCl hnyav hnyav, qhov uas tsis tau teem sijhawm cov cuab yeej poob nqi ntau dua $ 10,000 toj ib teev, 3-4x lub neej ntev ntawm cov cua sov-shrunk liners justifies tus nqi (20-35% saum extruded). Annealed extruded liners nrog 3.0mm phab ntsa tuaj yeem ua haujlwm zoo rau kev tsav tsheb uas tau siv tsis tu ncua.